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Astron®hf-s type AX7645 reactive gas generator
ASTRON hf-s TYPE AX7645 Reactive Gas Generator
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http:// /docs/UR/AX7645DS.pdf
This is "one piece". There are several scratches on the case itself.
We are unable to test this unit - it was part of a "clean-out"
and cost optimization. Based on the patented Low-Field Toroidal plasma technology, the
flows of other gases. A separate, lid-mountable plasma section and rack-mountable
power supply provide more options for installing the ASTRON
hf-s reactive gas generator is designed for increased flexibility for process hf-s offers the broadest operating range with up to 15 slm of NF3 along with high hf-s. The compact plasma
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