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> Tel/tokyo electron php hot plate module act 12 ACT12
Tel/tokyo electron php hot plate module act 12 ACT12
TEL/Tokyo Electron PHP Hot Plate for an ACT 12 CleanTrack Photo-Resist Developer/Coater System
Specifications are from Tokyo Electron and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
* Part Number: 2987-451227-W1, Description: PHP(ACT12-L)-I Unit
* According to paperwork with the part, the PHP plate has a small chip at the edge of one of the pin holes. A wafer in the pincette broke pins and one of the pins hit the edge of the pin hole and chipped it.
