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> Lam research 150MM wafer etcher tool 4520
Lam research 150MM wafer etcher tool 4520
Lam Research 150mm Wafer Etcher Tool 4520
The system includes two heat exchangers, Lam remote console, AC power box, and remote RF generator cart.
* Tylan 2900 Series mass flow controllers
* M and W Systems heat exchanger: RPCX28A-D-DT-DI10"-RM-3.OHE-AA
* FTS Systems chiller: RC211C1LAM
* Advanced Energy PDW 2200 RF generator
* Remote Console Cart: 852-017750-001-E-220
