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> Novellus deposition tool concept 2 two altus C2-dlcm
Novellus deposition tool concept 2 two altus C2-dlcm
Novellus Deposition Tool Concept 2 Two Altus C2-DLCM
This Novellus is used surplus. The overall physical condition is good and clean. It came from a world class manufacturing company known for its high maintenance standards. It is in clean condition, but there are signs of use.
The tool includes two CVD-W chambers, a power disconnect cabinet, ENI RF generators, two gas boxes, two computers, pump rack, and various cables. It does Not include a remote console. The main body features a Brooks MultiTran robot.
More photos are available. Please contact us for more information.
The tool is de-installed and no longer under power.
* Electrical Diagram: 76-10471-00
* CVD-W chambers: C2-CVD-W; Elec. Diagram: 76-10656-00; System Type: CVDW0115 (qty.2 chambers)
* Power Disconnect Cabinet; serial no: 610-1628472; wiring diagram: 76-025741
* ENI RF Generators OEM-28B, 2750W
