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> System components
> Old Style
> Hydrolic Components
> High pressure Components
> Varian s-gun 3120 sputtering sputter system
Varian s-gun 3120 sputtering sputter system
Eurotherm 980-1203 Temp Controller
Inficion XMS-1 Process Controller
Varian Master Programmer 980-6010
Varian Vacuum Process Control 980-6100
Accessory Planetary speed control
Varian 844 Ion Gauge Controller
(3) Varian 845 Ion Gauge Controller (2) are parts units
Varian Multigauge Controller (not shown in pictures)
Planetary fixtures for 3" and 4" wafers
System is currently not used any longer, was operational when last used.
