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Amat 200MM cat LCAT200P cassette alignment tool


APPLIED MATERIALS CAT LCAT200P-20001 Cassette Alignment Tool. Tested. Includes Metrology Cassette, Cassette Controller, Cassette Alignment Procedures Manual in clean room binder, Power Supply, Extension Alignment Plug (ERA), 200mm Unprocessed wafer, All Cables and Transport Case. For Front End Calibration of the Cassette Handler to the Robot. This tool will work on the Precision 5000 (P5000) Systems with the standard 200mm/8" Cassette Platform and the Ergoloader platform. It is also designed to calibrate Centura and Endura systems using the 200mm plastic cassettes in both the wide body and the narrow body loadlocks.



Amat 200MM cat LCAT200P cassette alignment tool