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> Gasonics aura A3010 plasma ashing system
Gasonics aura A3010 plasma ashing system
1ea Gasonics Mod. A3010 single wafer downstream microwave asher/cleaner system:
- single wafer processing for 3-8" wafers
- 3 ea process gas inputs (O2, H2N2, N2)
- programmable computer controller
- auto wafer loader/unloader (Z Bot robot)
- Infrared heat source for process temp. control
- downstream plasma process = no wafer radiation damage
- Quartz/Aluminum plasma chamber
- front and backside resist removal
- Automatic photo emission type end-point detection
- 1996 vintage (we also have a 1993 vintage system)
System includes: AC wall box, Lamp controller, Gas Box, AGL 1250W Microwave generator, Alcatel ADS 301 Dry pump/blower package
- System Subject to prior sale
- Good condition, removed from fab in Oct. 2007
- System weight approx 800 lbs
