____________________ > Auburn
> System components
> Old Style
> Tools
> Power tools
> Amat XR80 implanter vacuum interface 0090-91621ITL
Amat XR80 implanter vacuum interface 0090-91621ITL
AMAT XR80 Implanter Vacuum Interface 0090-91621ITL
* AMAT Model No: 0090-91621ITL
* Beamline Vacuum Control Panel 0100-90533
* Turbopump Interface 0100-90880
* Vacuum Gauge Interface 0100-90710
* Vacuum Interlock 0100-90881
* PCB 0100-90588 (Includes PCB 0100-90015)
