Advanced energy rfg-5500 rf generator

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Advanced energy rfg-5500 rf generator - 1 year warranty

Retronix RF has over 20 years experience in the repair and refurbishment of DC, LF, HF up to microwave power supplies and associated matching networks. We offer repair and reconditioning services across a wide range of RF circuitry, RF subsystems and RF matching units. We also supply a quality repair service for any low or high voltage DC power supply. All of Retronix RF processes are compliant and designed around ISO9001.
Retronix RF provides an excellent cross platform support for the semiconductor, solar and research and development industries, plus many more industries utilizing RF or DC plasmas within their processes.
Please contact us with your plasma application and we will match your needs!
The Advanced Energy, Inc. (AE) model RFG 5500 generator, product is a 13.56 MHz RF generator designed to regulate its output power based on forward power. The RFG 5500 generator will provide up to 5000 watts into a 50-Ohm, non-reactive load. This particular RFG-5500 generator includes a clamp circuit to guarantee the RF output will be less than one watt if the requested setpoint is zero. This generator also provides "setpoint tracking" that allows the RF output to closely track the user's setpoint for controlled ramping.
The RFG 5500 option 115 is designed to meet the SEMI F47-0200 specification for semiconductor processing equipment voltage sag immunity. The generator will maintain full functionality throughout any single F47 event, with no loss of setpoint. The unit is controlled through a 15 pin analog/digital user port. There is no operator control panel provided on this unit. A numeric display and eight status LEDs are visible from the front of the unit for monitoring the generator functions. The RFG 5500 generator provides common exciter (CEX) operation allowing two or more generators to be frequency locked to each other and/or to a common system clock.
The RFG 5500 generator is designed for 19-inch rack mounting with a panel height of 7 inches. AC power for the RFG 5500 generator is to be supplied from a 4 wire (3 phase with ground), 208 VAC (nominal), 47 to 63 Hz. power source. No neutral connection is required. The unit is water cooled with no provisions or requirements for forced air cooling.
Size: 17.8 cm H x 48.3 cm W x 58.4 cm D (7" x 19" x 23")
Weight: 52.2 kg. (115 lb.) maximum
Mounting: Rack mounting ears provided for standard 19" instrumentation rack. Side handles are provided to assist in lifting. Front panel handles are provided to assist inserting and removing from the rack cabinet.
Clearance: Clearance of 6" at rear of panel required for interconnects. No additional clearance about unit for ambient air flow is required.
RF Output Connector: Type LC Female
AC Input Power: 15' (4.6 m), 4-wire cord (SO, 8/4, 90C type, or equivalent) with Hubble CS8365C connector.
Circuit Breaker Lockout: A bracket for holding the breaker handle in the on or off position is included. For safety during system maintenance.
User Port Connector: 15-pin, subminiature-D, female
Coolant Connectors: 0.5" female NPT
RF Grounding Connector: 1/4-20 ground stud located on the rear of the unit
CEX Input Connector: Type BNC female
CEX Output Connector: Type BNC female
Line Voltage: 187 to 229 VAC (nominal 208 V); 3-Phase
Line Current: 28 A per phase typical at 5 kW
Over-current Protection: 50 A circuit breaker
Signal Amplitude: -1 dBm minimum, + dBm maximum
Signal Amplitude: +3 dBm minimum, +10 dBm maximum
Full Rated Output Power: 5000 W forward power minimum into a 50 non-reactive load
Output Power Range: 100 to 5000 W. RF is zero watts if the requested setpoint is 0.
Output Impedance: 50 for maximum power transfer
Setpoint Tracking Rate: The RF output tracks the setpoint input with slew rates of up to 100 V/sec with < or = to 5% accuracy. Under these conditions, the overshoot of the RF output does not exceed 5% and the setting time does not exceed 200 msec.
Warm-Up Time Delay: < 500 ms from AC On to RF On
Regulation: Forward power regulated at 1% of setpoint or 5 W (whichever is greater) into a 50 load
Response Time: < 40 ms rise and fall time from RF on or RF off.
Reflected Power Limit: Automatic foldback (forward power limiting) occurs if the reflected power at the generator output exceeds 1000 W. The generator is capable of generating 850 W of reflected power into an open circuit.
Harmonics: At full rated output, all harmonics are -55 dBc (below the RF output signal) when operated into a 50 non-reactive load.
Spurious Signals: Non-harmonic spurious and noise signals are -50 dBc (below the RF output signal) when operated into a 50 non-reactive load.
Transient Response: Less than 0.1% change in output power for a 10% change in the ac line voltage
Command Power Repeatability: < 0.5% over time for same generator, 1% generator to generator
Demonstrated Open Loop Power: 10 kW into a 50 load
Heat Removal: 11,270 BTU/hr. (3300 W) at full-rated RF output power
Temperature: +5 C to +25 C (+41 F to +77 F) inlet temperature
Flow Rate: 15.1 lpm (4 gpm) maximum
Pressure: 100 psi (6.9 bars) maximum inlet pressure
Contaminates: The following specifications are recommended for the water used to cool the RFG 5500 generator:
* Total dissolved solids < 250 ppm
* Total hardness expresses as calcium carbonate equivalent less than 250 ppm
* Specific resistivity of 2500 /cm or higher at 25 C
* Total dissolved solids (TDS) as estimated by the following: TDS < or = to 640,000 / specific resistivity ( /cm)
* Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds.
For all technical questions about our products please contact Eddie Rutherford at
Our office Hours: Monday - Friday: 8:00 AM - 5:00 PM Arizona time.
Closed Saturday, Sunday and all major US holidays. Location visits by appointment only.
Retronix International was established in 1992 specializing in repair and short loop debugging of cell phones and various other devices. Over the past 16 years Retronix has used this PCB experience to expand it capabilities into Semiconductors, Radio Frequency & other areas of growing need to providing internal and external Flexible . Retronix International is an expert in CIP s (contentious improvement projects), Labor Solutions , RF rebuild/repair, & complete FAB install/de-install worldwide. Retronix provides low-cost, high value added operations and engineering services and products to the Semiconductor and other industries. Retronix RF Group is headquartered in the UK with operations facility in Mesa, Arizona and soon to expand to Colorado Springs, CO.
Retronix Group globally employs 1000+ world-wide. Client list includes major semiconductor device manufacturers, used equipment brokers, and research and development companies. Retronix has global service agreements with major tier-1 IDM s.