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> Lot novellus pvd-300 wts-hv digital dynamics sioc mod
Lot novellus pvd-300 wts-hv digital dynamics sioc mod
LOT NOVELLUS PVD-300 WTS-HV DIGITAL DYNAMICS SIOC MOD
( 1 ) Novellus 02-167050-00 PVD 300 Module, Digital Dynamics SIOC PVD-Mod Controller Unit
( 1 ) Digital Dynamics 02-122367-00 ISIOC TIN-1 Interlock Module
( 1 )Novellus 02-123980-00 WTS-HV 3&4, SIOC Chassis Mezzanine, Digital Dynamics 02-122156-00 Controller with:
( 1 ) Digital Dynamics WTS-HV 3&4 Interlock Module, Part No. 02-123981-00
( 1 ) Digital Dynamics Controller Module, Part No. 27-053659-00
( 1 ) Digital Dynamics Power Supply Module, Part No. 27-053660-00
