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> Parker veriflo regulator- SQ420E-100, 1/2" 3 port fxmxf
Parker veriflo regulator- SQ420E-100, 1/2" 3 port fxmxf
New Veriflo UHP Pressure Regulator - SQ420E High Purity High Flow Regulator (Point of Use)
Part Number: SQ420E100W 3PVX FS8FMF
Description: 3 Ports, 316L SS Body, 250 psig max. Inlet Pressure, 100 psig max. Outlet Pressure
Tied Hastelloy C-22 Diaphragm, No Outlet Gauge, No Inlet Gauge, PCTFE Seat
3P port configuration: 1/2" Face Seal Female (Swivel) Inlet and Outlet Ports, 1/4" Face Seal Male on Gauge Port
Street Price from a Parker Distributor: $1,163.48
The Parker Veriflo SQ420E Series is a high performance, high purity, point-of-use pressure regulator for modern semiconductor processing. Precise control of the gas discharge pressure at or near the tool served makes possible stable process control by a mass flow controller.
* Tied diaphragm for added safety
* Capable of operating at a wide range of flows from 0.5 cc/min to more than 800 liter/min
* Compatible with the high flow of corrosive gases
* No threads exposed to the wetted area
